ANISOTROPIC CONDUCTIVE SHEET

摘要

An anisotropic conductive sheet which does not damage a wafer nor the electrode terminals of a conduction measuring instrument due to loading when the wafer is to be inspected, and ensures a good conductivity. The anisotropic conductive sheet (1) comprises porous resin layers formed by foaming and electron-beam-crosslinking fluororubber or tetrafluoroethylene-propylene copolymer rubber having an open cell structure and provided on the inner walls of a plurality of through holes (3) pierced in the thickness direction of an electrically-insulating porous sheet (2) made of foamed fluororubber or the like, characterized in that the skeleton surface of the porous resin is coated with metal. In addition, it is especially preferable for porous resin.