UNDULATED PAD CONDITIONER AND METHOD OF USING SAME

摘要

A pad conditioner having an abrasive disk (12) and an undulating disk (10) and methods for using the same. The undulating disk (10) has at least one raised portion (26) and at least one recessed portion (28). The abrasive disk (12) is releasably affixed to at least a portion of the recessed (28) portion to form an undulated abrasive surface (16). The undulating disk (10) allows the pad conditioner to be modified for use with multiple processes and for a variety of workpieces.