| 摘要 |
PROBLEM TO BE SOLVED: To provide a forming method of a metal fine particle dispersion pattern capable of forming a highly heat resistant metal fine particle dispersion pattern where metal fine particles are dispersed with high density on a polyimide base surface with a simplified process, and further to provide a forming method of a metal pattern capable of forming a highly heat resistant metal thin film with high density and with excellent uniformity on a polyimide base surface with a simplified process. SOLUTION: The forming method of a metal fine particle dispersion pattern comprises a process of producing, into a pattern shape, a graft polymer having a polar group and directly coupled to a base surface involving polyimide having a polymerization initiation in a skeleton on the base surface; a process of imparting a metal ion or a metal salt to the graft polymer; and a process of forming a metal fine particle adhesion region by depositing metal fine particles by reducing the metal ion or a metal ion in the metal salt. The forming method of a metal pattern heats the metal fine particle dispersion pattern obtained by the forming method of a metal fine particle dispersion pattern. COPYRIGHT: (C)2006,JPO&NCIPI |
