ANISOTROPIC CONDUCTIVE SHEET

摘要

The object of the invention is to provide an anisotropic conductive sheet which obtains good conductivity without damaging a wafer of a semiconductor nor electrode terminals of a conduction measurement instrument due to loading during inspection of the wafer. An anisotropic conductive sheet 1 of the invention is formed such that a porous resin layer is formed on inner walls of a plurality of through holes perforated in the thickness direction of an electrically insulating porous sheet 2, and the surfaces of skeletons of the porous resin are coated with metal. Examples of the porous resin layer include those which are obtained by means of foaming a fluororubber or a tetrafluoroethylene-propylene copolymer rubber, having an open-cell structure, and cross-liking the same through irradiation with electron beams. The sheet is particularly favorable for a porous resin.