| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology to stabilize an output of a pulse laser beam as a mean value, to suppress the level of the inter-pulse fluctuation of the output of a pulse laser beam, and to prevent a change of the level of the fluctuation. SOLUTION: A high voltage impressing device 8 impresses a voltage between discharge electrodes 2a and 2b. A gas purifying device 4 extracts a portion of laser medium gas from a chamber 1, and cools the extracted laser medium gas in order to liquefy and capture impurity gas contained in the extracted laser medium gas, and to return the laser medium gas whose impurity gas is removed to a chamber 1 again. A light intensity detector 9 detects the pulse energy of a pulse laser beam L. A temperature impressing device 12 controls the cooling temperature of the laser medium gas by the gas purifying device 4 on the basis of the value of the volage impressed between the discharge electrodes 2a and 2b by the voltage impressing device 8 and the detection result of the light intensity detector 9. COPYRIGHT: (C)2006,JPO&NCIPI |
