| 摘要 |
PROBLEM TO BE SOLVED: To provide a package for a pressure detecting apparatus which is compact and highly reliable, has high sensitivity in detecting pressure exerted from the outside, and capable of accurate detection over a long period. SOLUTION: The package for the pressure detecting apparatus is provided with an insulating substrate 1, having a mounting part 1b for mounting a semiconductor device 3 in one main surface; a plurality of wiring conductors 5 arranged in the surface and inside of the insulating substrate 1 and each electrically connected to electrodes of the semiconductor device 3; an insulating plate 2 in a flexible state, jointed to the insulating substrate 1 so as to form a sealed space in-between with the other main surface of the insulating substrate 1; a first electrode 7 for forming electrostatic capacitance deposited to the other main surface of the insulating substrate 1 in the sealed space and electrically connected to one of the wiring conductors 5; and a second electrode 9 for forming electrostatic capacitance deposited to the inside main surface of the insulating plate 2, in such a way as to be opposed to the first electrode 7 and electrically connected to another electrode of the wiring conductors 5. A plurality of recessions and protrusion in the shape of a curved surface are formed in the outside main surface of the insulating plate 2. COPYRIGHT: (C)2006,JPO&NCIPI
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