| 摘要 |
PROBLEM TO BE SOLVED: To provide a high concentration ozone generating unit and a manufacturing method for the ozone generating unit. SOLUTION: The ozone generating unit consists of an ozone generator, which has a gas passage by combining a couple of ozone generating boards having gas sealing walls on the outer and inner surfaces and many pedestrals so that the gas sealing walls themselves and the many pedestrals themselves are in contact, and there is a high voltage electrode board in between, and an earth side support board on both upper and lower surfaces, oxygen, nitrogen, or the like-supply parts and an ozone suction part, and a controlling part which has a high-frequency power source unit, an ozone decomposition burner, an ozone concentration meter, and a flow controlling valve, and located in the midpoint of the ozone decomposition burner and the ozone concentration meter, and controls the gas supply parts, the ozone suction part, a matching unit, a filter, and a water cooling unit, and an oxygen cylinder and a nitrogen cylinder, which are connected to the filter via a pressure regulator, a flow regulator, and an oxygen flow meter, and flow rate, electric power, sequence, and the like. COPYRIGHT: (C)2006,JPO&NCIPI
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