MANUFACTURING METHOD OF PIEZOELECTRIC FILM, LAMINATE STRUCTURE OF SUBSTRATE AND PIEZOELECTRIC FILM, PIEZOELECTRIC ACTUATOR, AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a simple manufacturing method of a piezoelectric film which simultaneously satisfies various kinds of characteristics required to the piezoelectric film.

SOLUTION: In an aerosol deposition method (AD method) of forming the piezoelectric film on a substrate by spraying aerosol containing particles of piezoelectric material to the substrate to stick the particles, a first piezoelectric layer is formed on the substrate (first film forming process), and a second piezoelectric layer is formed on the first piezoelectric layer by spraying the aerosol so that the collision energy of the particles with the substrate may be smaller than that in the first film forming process (second film forming process). A method like this can generate the piezoelectric film having a layer of good adhesiveness on the side of a surface opposing the substrate and a layer of good piezoelectric characteristic on outside of it, so that both of adhesiveness and a piezoelectric characteristic are realized. Since a layer with different characters can be laminated by only varying a deposit condition by the same AD method, the piezoelectric film with good characteristic is obtained without complicating a manufacturing process.

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