| 摘要 |
PROBLEM TO BE SOLVED: To provide the manufacturing method of an optical waveguide with which the surface of a core is planarized in a recessed shape process. SOLUTION: By the manufacturing method of the optical waveguide, while impressing high frequency power to a susceptor 40 which supports a first clad 12 having a groove 12b on the first clad 12 using a plasma CVD device 200, a core film 14a having a groove 14b corresponding to the groove 12b is formed first. Next, a resist film 16a in which the groove 14b of the core film 14a is embedded is formed. Next, the core 14 is formed in the groove 12b of the first clad 12 by etching the resist film 16 and the core film 14a. Next, a second clad 18 is formed on the first clad 12 and the core 14. COPYRIGHT: (C)2006,JPO&NCIPI |
