发明名称 |
PROJECTING AND RECESSED PATTERN FORMING METHOD AND PROJECTING AND RECESSED PATTERN FORMING MEMBER |
摘要 |
PROBLEM TO BE SOLVED: To provide a method of forming a projecting and recessed pattern without generation of dust even on a large-area and stepped base plate. SOLUTION: This projecting and recessed pattern forming method includes: a process of stacking a sheet-like base material having a particle layer on one principal plane on the base plate with the principal plane side having the particle layer brought into contact therewith; a process of removing the sheet-like base material from the base plate so that the particle layer is left on the base plate; and a process of etching the surface of the base plate taking the fine particle layer as an etching mask to form a fine projecting and recessed pattern on the surface of the base plate. The pattern forming member is used in the above method. COPYRIGHT: (C)2006,JPO&NCIPI
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申请公布号 |
JP2005279807(A) |
申请公布日期 |
2005.10.13 |
申请号 |
JP20040094985 |
申请日期 |
2004.03.29 |
申请人 |
TOSHIBA CORP |
发明人 |
HIRAOKA TOSHIRO;NAKANISHI TSUTOMU |
分类号 |
B82B3/00;H01L51/50;H05B33/02;H05B33/14;(IPC1-7):B82B3/00 |
主分类号 |
B82B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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