发明名称 Microelectromechanical device with reset electrode
摘要 A microelectromechanical device having a reset electrode for use in various devices including display devices such as those employing spatial light modulators. The device includes an optically transmissive substrate, a semiconductor substrate, and a member deflectable between a rest position and an operative position supported by one of the substrates. The deflectable member returns to an undeflected position by operation of the reset electrode.
申请公布号 US2005225834(A1) 申请公布日期 2005.10.13
申请号 US20040817028 申请日期 2004.04.02
申请人 REGAN MICHAEL J 发明人 REGAN MICHAEL J.
分类号 G02B26/08;(IPC1-7):G02B26/00 主分类号 G02B26/08
代理机构 代理人
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