ION IMPLANTER SYSTEM, METHOD AND PROGRAM PRODUCT INCLUDING PARTICLE DETECTION

摘要

An ion implanter system (100), for detecting at least one particle level in an ion beam (104) includes a bright field laser particle detector (200) for receiving a laser beam (112) transmitted through at least a portion of the ion beam (104) to obtain an accurate particle level, and a controller (120) for controlling the ion beam (104) based on the at least one article level.