INSULATED PAD CONDITIONER AND METHOD OF USING SAME
摘要
<p>A wafer planarization process with a conditioning tool (14) having an electrical insulator that electrically insulates the abrasive surface of the conditioning tool (14). The electrical insulator extends the useful life of the abrasive surface of the conditioning tool (14) by reducing the level of electrochemically driven corrosion.</p>
申请公布号
WO2005095055(A1)
申请公布日期
2005.10.13
申请号
WO2005US02309
申请日期
2005.01.25
申请人
3M INNOVATIVE PROPERTIES COMPANY
发明人
PALMGREN, GARY M.,;GOERS, BRIAN D.,;PYSHER, DOUGLAS J.,
