| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric element in which the thickness of the lowest piezoelectric layer is made thin, a variation of displacement quantity in the height position of an end face on a driving part-side is less and the reliability of electric connection of an inner electrode and an outer electrode on a driving-side is secured. <P>SOLUTION: First and second inner electrodes 3a to 3d and 4a to 4c are arranged in a piezoelectric material 2 so that they are overlapped through the piezoelectric layers. The piezoelectric layer between a second lower face 2d and the inner electrode 3d of the lowest layer is made thinner than the piezoelectric layer sandwiched between the first and second inner electrodes. In the piezoelectric element 1, a dummy electrode 7 is arranged lower than the second inner electrode 4c on the driving part-side, which is just above the inner electrode 3d in the lowest layer, in a region between the inner end of the inner electrode 3d in the lowest layer and a second end face 2b. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
