| 摘要 |
PROBLEM TO BE SOLVED: To provide an automatic focusing control device that shortens time needed for an automatic focusing process. SOLUTION: The automatic focusing control device comprises: an imaging section including a lens which is movable in a focusing direction and moves the image forming point of light transmitted from a plate on which a plurality of measurement targets are arranged, and a photo-electric converting part which converts light from the measurement target on the plate into an electric signal; an initial setting section by which the initial position of the lens in the focusing direction is set for an object to be measured subsequently is set using positional information on the plate and information about the focused position of the lens acquired for an object measured; and an automatic focusing section which moves the lens to the initial position relative to the object to be measured subsequently, then moves it in a focusing direction from the initial position, and thus detects the focused position of the lens. COPYRIGHT: (C)2006,JPO&NCIPI |
