| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic transducer for generating ultrasonic waves having a wide band or a high focusing level, and to provide a method for manufacturing the ultrasonic transducer. SOLUTION: Only a green sheet is laminated at a portion set to be an acoustic damper 36 and an acoustic lens 37, and the green sheet made of the same material as the above and an electrode are alternately laminated at a portion set to be a piezoelectric vibrator 38 at the center (a). In the damp-dry state of the laminated ceramic (b), a trough-shaped recess surface 41 is formed by putting a spot facing 39 in the dot direction in parallel with the longitudinal direction in the acoustic lens 37 before burning (c). Common electrodes 43a, 43b are bonded to the edge of a laminated electrode 42 exposed onto both end faces in the lateral direction of the piezoelectric vibrator 38 (d). Dicing is performed so that the lower portion 36a of the acoustic damper 36 is left uncut with a prescribed element width (c) in the X direction and with a pitch (d) in the Y direction (e). Resin 45 is filled into the cut groove between elements, where the piezoelectric vibrator 38 is divided into separate piezoelectric vibrators 44. After that, wiring is performed to each electrode for connecting with a drive control circuit. COPYRIGHT: (C)2006,JPO&NCIPI
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