| 摘要 |
PROBLEM TO BE SOLVED: To reduce a stopper exchanging frequency by prolonging the durable life of a stopper to maintain a positioning accuracy throughout a long period of life. SOLUTION: A substrate transfer apparatus 2 comprises a pair of parallel conveyors 4, 5 upper surfaces of which form a substrate transfer surface 8, and a pair of guides 11, 12 erected at side plates 9, 10 of the conveyors 4, 5 along a substrate transfer direction X for guiding the both side surfaces of a substrate P with a predetermined gap therebetween. A positioning device 1 for substrate transfer is employed in the substrate transfer apparatus 2. The positioning device positions the substrate P by projecting against a substrate transfer surface 8 and abutting against the surface of the tip end of the substrate P. The positioning device has a rotary roller 15 for abutting against the tip end surface of the substrate P, and a means 16 provided to the side plates 9, 10 for rotatably supporting the roller 15 and advancing or retreating the roller 15 against the substrate transfer surface 8. COPYRIGHT: (C)2006,JPO&NCIPI
|
