| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum processing device with an improved product yield and a vacuum processing method it employs. SOLUTION: This vacuum processing device 1 comprises a number of vacuum processing rooms 7 for vacuuming samples 2; a vacuum transportation means 8 for carrying in the samples to and carrying them out from a vacuum processing room 7; a room 9 for switching to air or vacuum atmosphere; a means 10 capable of mounting a number of cassettes to storing the samples, a vacuum transportation means 4 that can move vertically to select a sample from any cassette in the above cassette mount means 10; and a control means for carrying in a selected sample from a cassette to the above vacuum processing room through the above vacuum transportation means, the room, switchable to air or vacuum, and transportation means, then carrying out the processed sample from the above vacuum processing room. This device also comprises a means capable of mounting a backup cassette 5 that prevents the processed and unprocessed samples from being mixed in the same cassette. COPYRIGHT: (C)2006,JPO&NCIPI
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