| 摘要 |
PROBLEM TO BE SOLVED: To provide a mini environment device capable of reducing a load for a chemical filter, capable of coping with a chemical component generated in an inside, and requiring no cooler. SOLUTION: This mini environment device is provided with an air intake port 60 for taking air in from an outside, a circulation blower 64 for circulating mixture air of the taken-in air from the air intake port 60 and circulation air returned from an intermediate chamber 70, an HEPA filter 68 for removing dust in the mixture air, a circulation passage 78 for returning one portion of the air passed through the intermediate chamber 70 as the circulation air, to the circulation blower 64, an exhaust port 80 for exhausting the rest of the air passed through the intermediate chamber 70, to an outside area, the chemical filter 66 arranged in a circulation route of the circulation air, and a damper 62 for regulating a circulation rate of the circulation air. COPYRIGHT: (C)2006,JPO&NCIPI
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