SUSCEPTOR

摘要

A susceptor used for semiconductor epitaxial growth, by which a plurality of highly uniform epitaxially grown films can be obtained at the same time. The susceptor is used for semiconductor epitaxial growth, and is composed of a barrel-type susceptor, which has a plurality of planes whereupon a plurality of substrates can be freely placed on the external side, and a member, which has the barrel-type susceptor inside and has planes arranged to face each of the planes of the barrel-type susceptor by inclining in the same direction. Alternatively, the susceptor is composed of a barrel-type susceptor, which has a plurality of planes whereupon a plurality of substrates can be freely placed on the inner side, and a member, which has the barrel-type susceptor on the outer circumference part and has planes arranged to face each of the planes of the barrel-type susceptor by inclining in the same direction.