| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vaporizer effectively vaporizing liquid. <P>SOLUTION: A variation of an area of an interface caused by the fluidity of liquid can be restrained, and the liquid can be stably vaporized since the liquid flowing from a flow passage 28 into a space 21 can set the position of a gas-liquid interface at the time of the evaporation of the liquid by the heat of a thin film heater 17, and secure a vaporization area for the vaporization of the liquid by interface maintaining means 22, 22, ... formed in a space 21 composed of grooves 23, 24 having the same shapes with each other formed on a first base plate 10 and a second base plate 16, respectively. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
