| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized, high-precision pressure sensor which reduces the occurrence of cracks and deformation in a second electrode during manufacturing or in use. SOLUTION: The pressure sensor comprises a plurality of first wiring and a plurality of second wiring which are arranged so that they cross each other and a sensor section provided at a position other than an intersection of the both wiring. The sensor section comprises a first electrode 18 electrically connected to the first wiring, an insulating film 23 placed around the first wiring, the second electrode 19 which is electrically connected to the second wiring, is supported by the insulating film, and is arranged facing the first electrode to form a cavity 20 with the first electrode, an overcoat film 36 formed on the surface of the second electrode, a metallic overcoat barrier film 45 formed on the overcoat film, and a protective film 27 which is formed on the overcoat barrier film so as to cover the entire sensor section other than the position corresponding to the center of the second electrode. COPYRIGHT: (C)2006,JPO&NCIPI
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