发明名称 THIN FILM EVALUATION DEVICE AND EVALUATION METHOD IN ELECTRONIC DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a procedure for measuring and evaluating adhesiveness of a thin film having the film thickness of 10μm or less, especially a photosensitive resin film, which is used in an electronic device. SOLUTION: When cutting and exfoliating the thin film by a cutting blade, in order to reduce strengthening of a horizontal force generated after exfoliation, water drops are dropped onto the contact surface between the cutting blade and the thin film, to thereby reduce a frictional force on the contact surface. Hereby, the horizontal force can be measured and evaluated stably and accurately. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005283215(A) 申请公布日期 2005.10.13
申请号 JP20040094716 申请日期 2004.03.29
申请人 OMI TADAHIRO;NIPPON ZEON CO LTD 发明人 OMI TADAHIRO;OSAKO YUMI;SUZUKI TERUHIKO
分类号 G01N19/04;(IPC1-7):G01N19/04 主分类号 G01N19/04
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