| 摘要 |
PROBLEM TO BE SOLVED: To prevent the impairing of cleanliness of adjacent rooms even when a trouble happens in one of the rooms in a case when the rooms of high cleanliness are connected to successively transfer components to each room to perform the processing and treatment. SOLUTION: In this method of keeping cleanliness of each room in a case when the rooms 2A - 2E wherein the cleanliness is increased by sending the air flow from air blowers 4A - 4E, are connected to perform the processing while successively transferring the components to each of connected rooms, the air flow is adjusted to increase the pressure in the room having the trouble, and further the pressure of the rooms adjacent to the rooms at both sides of the room having the trouble, in accompany with the opening of the door of the room having the trouble, in a case when the trouble happens at least in one of the connected rooms. COPYRIGHT: (C)2006,JPO&NCIPI
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