| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface treatment method and a surface treatment device capable of forming a coating layer having the performance to be required while suppressing influence on the member to be treated caused by heat input. SOLUTION: In the surface treatment method and device therefor, voltage is applied to the space between the electrically conductive member 11 to be treated and a bar-shaped electrode 3 to generate discharge, thus a coating layer 18 of electrode components is formed on the surface of the member 11 to be treated. The coating layer 18 is formed while vibrating the electrode 3 between a state where the tip part of the electrode 3 is contacted with the member 11 to be treated and a state where the electrode 3 and the member to be treated are separated by a distance at which discharge is generated therebetween or further. Thus, the coating layer satisfying the performance to be required can be formed, and further, heat input volume at the time of forming the coating layer can be securely reduced to≤1 kJ/cm. Thus, the coating layer having the performance to be required can be formed while suppressing influence on the member to be treated caused by heat input. COPYRIGHT: (C)2006,JPO&NCIPI
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