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发明名称
Verbesserter Kontakt für Speicherzellen
摘要
申请公布号
DE10344273(B4)
申请公布日期
2005.10.13
申请号
DE20031044273
申请日期
2003.09.24
申请人
INFINEON TECHNOLOGIES AG
发明人
HILLIGER, ANDREAS
分类号
H01L23/522;G11C11/22;H01L21/768;H01L21/8246;H01L27/105;H01L27/115;(IPC1-7):H01L27/115;G11C11/40
主分类号
H01L23/522
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