| 摘要 |
PROBLEM TO BE SOLVED: To form a thick DLC (diamond-like carbon) film on a surface of a base material to reduce the residual stress in the film. SOLUTION: A base material to be coated is placed in a vacuum container filled with hydrocarbon-based gas, the pulse RF voltage and the high-voltage DC pulse voltage of negative polarity are alternately applied to the base material, the DC pulse voltage is applied after completion of application of the pulse RF voltage, and the pulse-height value of the DC pulse voltage is set to the threshold voltage transferred to the glow discharge. The hydrocarbon-based gas is toluene gas, the gas pressure is set to be 0.1-2 Pa, and the DC pulse voltage is applied in 10-50μs after completion of application of the pulse RF voltage. The DLC film having the residual stress of the coated base material, which is 0-0.5 GPa is provided. The DLC film having thickness of 1-40μm is provided. COPYRIGHT: (C)2006,JPO&NCIPI
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