发明名称 Method of and system for manufacturing organic EL devices
摘要 It is an object of the present invention to eliminate a color deviation possibly caused by a film formation failure in an organic layer of organic EL devices, thereby improving product yield. A method of manufacturing organic EL devices according to the invention comprises: a pre-treating step for forming lower electrodes and the like on a substrate, a film formation step to be performed after the pre-treating step for forming on the lower electrodes an organic layer containing at least an organic luminescent layer and also forming upper electrodes thereon, and a sealing step to be performed after the film formation step for sealing up the organic layer and the upper electrodes, characterized in that an inspection step is performed after the pre-treating step but before the formation of the upper electrodes.
申请公布号 US2005227385(A1) 申请公布日期 2005.10.13
申请号 US20050100503 申请日期 2005.04.07
申请人 TOHOKU PIONEER CORPORATION 发明人 TAN HIROKI
分类号 H05B33/10;H01L21/66;H01L27/32;H01L51/50;H05B33/14;H05B33/22;(IPC1-7):H01L21/66 主分类号 H05B33/10
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