Removing hot gas corrosion protection layers on especially turbine blades involves reactive or non-reactive vacuum etching with component in contact with high density plasma from which gas ions are extracted using negative bias potential

摘要

The method involves reactive or non-reactive vacuum etching, whereby at least one component (100) is brought into contact with a high density plasma from which gas ions with a gas density of in excess of 30 mA per square cm. are extracted and the component is subjected to a negative bias potential between 50 and 3000 Volts relative to the plasma potential.