发明名称 DRIVING METHOD OF FEEDING MECHANISM
摘要 <P>PROBLEM TO BE SOLVED: To suppress the wear of a sliding material provided in the slider of a contacting type actuator, with respect to the driving method of a feeding mechanism. <P>SOLUTION: The feeding mechanism includes constitutively a pressed member 1, an actuator 2 having the function for controlling the displacement quantities of its end 3 individually and correspondingly to the respective axes of a spatial coordinate by electrical signals, a holding member 4 having the function for so holding the actuator 2 as to contact its end 3 pressingly with the pressed member 1, and a controller 5 for feeding the electrical signals to the actuator 2. Further, in the feeding mechanism wherein one of the pressed member 1 and the holding member 4 is so fixed as to move the other, the displacement of the end 3 of the actuator 2 is changed over to the positive sense or negative sense of its feeding direction, and the changeover time of its displacement quantity is so made to be variable as to drive it under a predetermined rule. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005286164(A) 申请公布日期 2005.10.13
申请号 JP20040099163 申请日期 2004.03.30
申请人 KUMAMOTO UNIV;KUMAMOTO TECHNOLOGY & INDUSTRY FOUNDATION 发明人 ENDO YASUSHI;EGASHIRA YOSHIYA;KUBOTA HIROSHI;KOSAKA KOJI;NAKADA AKIRA
分类号 H01L21/027 主分类号 H01L21/027
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