| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inertia sensor such as an acceleration sensor and a gyro with excellent impact resistance. <P>SOLUTION: A weight 12 and a frame 14 are formed integrally on an SOI substrate such as a laminated wafer by an MEMS technique. A weight stopper 16 is overhung horizontally from the frame 14 of an upper Si crystal portion of the SOI substrate while covering one portion of a clearance between the frame 14 for supporting a beam 13 and the weight 12, and is formed of the clearance d to cover one portion of the frame 14 side area of a main face in the weight 12. The weight stopper 16 does not brake the weight 12 when the weight 12 is moved within a movable range (less than d) corresponding to a dynamic range of a sensor, but the weight stopper 16 brakes the weight 12 when the weight 12 is moved over the movable range (d or more) corresponding to the dynamic range of the sensor by an impact applied to the sensor, and the situation such as destruction is evaded thereby. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
