| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming a pillar-shaped metallic body for highly precisely controlling the shape, size and position of a pillar-shaped metallic body in order to facilitate countermeasures to further fining, and further provide a pillar-shaped metallic body to be obtained by the formation method and a wiring board equipped with the pillar-shaped metallic body. SOLUTION: This method for forming a pillar-shaped metallic body for forming a pillar-shaped metallic body EP by the etching of a metallic layer comprises a process to form a first mask layer at a position where the pillar-shaped metallic body EP of the metallic layer is formed, a process to form a projecting part 24a being the upper part of the pillar-shaped metallic body EP by partially etching the metallic layer, a process to remove the first mask layer, a process to form a second mask layer 30 coating the projecting part 24a and its peripheral residual metallic layer 24c with almost fixed width, and a process to form a lower part 24b of the pillar-shaped metallic body EP by etching the residual metallic layer 24c. COPYRIGHT: (C)2006,JPO&NCIPI |
