INSPECTION SYSTEM AND METHOD FOR PROVIDING FEEDBACK

摘要

PROBLEM TO BE SOLVED: To automatically performing adjustment in real time to improve reliability and to improve speed by performing feedback between different portions in an image collection inspection system. SOLUTION: This inspection system 100 inspects a characteristic of an object 130 by use of a feedback mechanism. The inspection system 100 includes a processor 150 receiving image data 145 or 165 showing the object 130. The processor 150 finds parameter change information 450 from the image data 145 or 165, and changes an image parameter 400 or 600 used during generation of the image data 145 or 165 with the parameter change information 450. The changed image parameter 400 or 600 is used during the generation of the next image data 145 or 165 showing the object 130. COPYRIGHT: (C)2006,JPO&NCIPI