| 发明名称 |
Method for processing electrical parts, particularly for processing semiconductor chips and electrical components, and device for carrying out said method |
| 摘要 |
The invention relates to a novel method for processing electrical parts, particularly for processing semiconductor chips and electrical components, and a device for carrying out the inventive method.
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| 申请公布号 |
US2005224186(A1) |
申请公布日期 |
2005.10.13 |
| 申请号 |
US20040512086 |
申请日期 |
2004.11.08 |
| 申请人 |
SILLNER GEORG R |
发明人 |
SILLNER GEORG R. |
| 分类号 |
H01L21/50;H01L21/00;H01L21/683;(IPC1-7):B32B1/00;B32B35/00 |
主分类号 |
H01L21/50 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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