DIODE ELEMENT AND DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a diode element which can be suitably used for an electron source, a light emitting diode, and a light receiving element formed with semiconductor fine crystal layer like an effective and stable nano-crystalline silicon layer with a long life.

SOLUTION: The diode element (6) is composed of a semiconductor substrate or a conductive substrate (11) having an electrode (10) on a back surface, a semiconductor fine crystal layer (9) formed on the substrate or at the front face side thereof, and a surface electrode (7) formed on the semiconductor fine crystal layer (9). Vapor annealing treatment is applied to the semiconductor fine crystal layer (9).

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