| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a precision machine or the like capable of measuring the variation per hour of the plane accuracy of a plane to be measured after the completion of assembly. <P>SOLUTION: An instrument 21 of a plane change measuring instrument 20 is arranged on base parts 13A to 13D of the inside of a bottom surface of a vacuum chamber 10. An electrostatic capacity sensor 30 is attached to a free end part 23a of an extending piece part 23 of the instrument 21. In the present invention, the time displacement of the upper surface of the base part 13D to the plane using three points of the base parts 13A to 13C as a standard is measured by the electrostatic capacity sensor 30 using the plane change measuring instrument 20. Thereby, since the relative displacement of the base part (measurement point) 13D to the base parts (supporting point) 13A to 13C of three points as the standard can be measured, the flatness after the assembly in the vacuum chamber 10 can be controlled. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
