| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature compensation device capable of performing precise temperature measurement by use of a plurality of thermocouples and compensation temperature sensors of a number smaller than the number of thermocouples. SOLUTION: This temperature compensation device for measuring temperatures of a plurality of measuring objects through a plurality of measuring thermocouples CT1 and CT2 and one compensation temperature sensor 130 comprises one criterial connection part 110 disposed in the vicinity of the compensation temperature sensor; at least one other connection part 120 disposed away therefrom, to which the measuring thermocouple different from the measuring thermocouple of the one connection part is connected; a temperature compensating thermocouple CTD measuring the temperature difference between the connection parts; and a switching means switching a circuit for measuring the temperatures of the measuring objects by use of the measuring thermocouple of the other connection part and a circuit for measuring the temperature difference between the connection parts through the temperature compensating thermocouple. The temperature of the other connection part is determined from the measured temperature difference between the connection part to correct the measured temperature by the measuring thermocouple connected to the other connection part. COPYRIGHT: (C)2006,JPO&NCIPI |
