| 摘要 |
PROBLEM TO BE SOLVED: To provide a laminated structure of calcined alumina substrates and unfired green sheets, adapted to obviate the occurrence of delamination (interlayer exfoliation) between the calcined alumina substrate and a stacked ceramic green sheet, even when stacking materials having different thermal expansion coefficients. SOLUTION: A method includes a first lamination process of stacking green sheets 2a, 2b on both sides of an alumina substrate 1, sintered at a temperature higher than the sintering temperature of the green sheets 2a, 2b; a process of stacking green sheets for restraint 3a, 3b on the outermost layers of the laminated structure, the green sheet 3a, 3b not sintering in property at the sintering temperature of the green sheet to form a second laminated structure; a binder removal process of heating the second laminated structure, at a first heating temperature in a range of 280 to 350°C for a predetermined time interval, to remove a binder component contained in the green sheets 2a, 2b; a firing process of sintering the second laminated structure at a temperature in a range of 800 to 1000°C; and a restraining layer removal process of removing the green sheets for restraint 3a, 3b from the second laminated structure. COPYRIGHT: (C)2006,JPO&NCIPI |
