System and method for cooling motors of a lithographic tool

摘要

A system and method of cooling motors of a lithographic tool. The system includes a temperature-adjusting device which adjusts the temperature of a heat transfer fluid to a boiling temperature that is substantially equal to the desired motor housing temperature. The system further includes a fixed or adjustable pressure device which adjusts the pressure of the heat transfer fluid to a predetermined level to maintain the boiling temperature. The boiling temperature remains substantially constant as the heat generated by the motor is absorbed by the heat transfer fluid. A pump pumps the heat transfer fluid through the temperature adjusting device, the pressure device and the motor. The system functions as a closed-looped system with the addition of a condenser/heat exchanger.