INTEGRATED CIRCUIT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an integrated circuit device which includes a temperature sensor which can stably measure temperature with higher accuracy in the integrated circuit device provided with a resistance body as the temperature sensor which changes electrical resistance value in accordance with temperature. SOLUTION: The temperature monitoring member 6 formed of vanadium oxide is provided within the semiconductor integrated circuit device 1 wherein one end thereof is connected to a via V3 and the other end is connected to a via V4. At the lower side of the temperature monitoring member 6, an equally heating member 5 formed of aluminum is also provided. In the viewing from the flat plane, a half or more larger region of the entire part of the temperature monitoring member 6 is overlapped with the equally heating member 5. COPYRIGHT: (C)2006,JPO&NCIPI