| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact infrared sensor with high sensitivity, high time responsibility and easy productivity. SOLUTION: The infrared sensor is equipped with an infrared detecting element 43 converting infrared rays into electrical signals by receiving them and an optical element 44 leading infrared rays to the infrared detecting element 43, wherein the optical element 44 as a planar typed optical waveguide equipped with diffraction grating is formed on a substrate 41 by apposing with the infrared detecting element 43. Incident infrared rays 49 from the direction perpendicular to the substrate face by the optical element 44 is converted their optical path, waveguided to the direction parallel to the substrate face, and ultimately forced to enter into the infrared detecting element 43. COPYRIGHT: (C)2006,JPO&NCIPI
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