发明名称 |
Microring and microdisk resonators for lasers fabricated on silicon wafers |
摘要 |
Briefly, in accordance with one embodiment of the invention, a method is disclosed. The method includes forming a microresonator on a silicon substrate. The microresonator includes an annular structure to recirculate light at a desired wavelength.
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申请公布号 |
US2005226591(A1) |
申请公布日期 |
2005.10.13 |
申请号 |
US20050121582 |
申请日期 |
2005.05.04 |
申请人 |
GARDNER DONALD S;BRONGERSMA MARK L |
发明人 |
GARDNER DONALD S.;BRONGERSMA MARK L. |
分类号 |
G02B6/12;H01S3/063;H01S3/083;(IPC1-7):G02B6/00 |
主分类号 |
G02B6/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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