| 发明名称 |
Mars optical modulators |
| 摘要 |
The specification describes an improved Moving Anti-Reflection Switch (MARS) device structure that largely eliminates charge build up on the movable membrane, and reduces stresses that cause curling of the membrane. The improved device uses a movable membrane made of single crystal silicon.
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| 申请公布号 |
US2005225835(A1) |
申请公布日期 |
2005.10.13 |
| 申请号 |
US20050060870 |
申请日期 |
2005.02.18 |
| 申请人 |
BISHOP DAVID J;GOOSSEN KEITH W;GREYWALL DENNIS S;WALKER JAMES A |
发明人 |
BISHOP DAVID J.;GOOSSEN KEITH W.;GREYWALL DENNIS S.;WALKER JAMES A. |
| 分类号 |
G02B26/08;(IPC1-7):H04J14/02 |
主分类号 |
G02B26/08 |
| 代理机构 |
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