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发明名称
A VALVE CONTROL APPARATUS AND METHOD OF GAS LINE OF A THIN-FILM MANUFACTURE APPARATUS
摘要
申请公布号
KR20050099118(A)
申请公布日期
2005.10.13
申请号
KR20040024283
申请日期
2004.04.09
申请人
INTEGRATED PROCESS SYSTEMS LTD.
发明人
CHANG, HO SEUNG;SEO, TAE WOOK;YOON, YOUNG YEOP
分类号
C23C16/52;(IPC1-7):C23C16/52
主分类号
C23C16/52
代理机构
代理人
主权项
地址
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