| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of effectively suppressing contamination on the surface of an object to be processed caused by a decomposition product, enabling a laser-processed product to be easily produced with enhanced production efficiency in processing the object to be processed by ablation using a laser light. <P>SOLUTION: The method of producing the laser-processed product uses a sheet, as an adhesive sheet 2 for laser processing, on the base material of which at least an adhesive agent layer is disposed and the adhesive of <1 in the ratio of the total bonding energy A which is minimum among a plurality of sum bonding energies between a certain carbon atom and other atoms bonding to the carbon atom in the resin component of the base material to the total bonding energy B which is minimum among a plurality of sum bonding energies between a certain corbon atom and other atoms bonding to the carbon atom in the using raw material component for the object to be processed is used. The method includes a step of bonding the adhesive sheet 2 to the laser-light exit surface side of the object 1 to be processed with the adhesive agent layer in between, a step of processing the object 1 by irradiating it with a laser beam 6 having irradiation intensity that is greater than a threshold value at which the object 1 causes ablation and is not more than twice the irradiation intensity at which a through-hole is formed in the object 1, and a step of separating the adhesive sheet 2 for laser processing from the object 1 processed. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
