| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a multilayered ceramic element which allows the manufacture of a good product even if the number of laminations or the size is increased and which is especially suitable for a multilayered piezoelectric element. <P>SOLUTION: Ceramic precursor layers containing a material for ceramic layers and internal electrode precursor layers containing metal copper as a material for internal electrode layers are alternately laminated to form a laminate, and then the laminate thus fabricated is heated and degreased. At that time, an atmospheric gas containing an inert gas, steam of ≥7 mol% and ≤50 mol%, and, if necessary, hydrogen is introduced, and the partial pressure of oxygen is adjusted within a range of p(O<SB>2</SB>)≤(25331×Kp)<SP>2/3</SP>, where p(O<SB>2</SB>) is the partial pressure of oxygen, Kp is a dissociation equilibrium constant of water, and the unit is Pa in which the partial pressure of oxygen is measured. By this method, while suppressing the oxidation of the metal copper, a binder can be sufficiently decomposed to be removed, leading to the reduction of residual carbon. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
