| 摘要 |
PROBLEM TO BE SOLVED: To provide a humidity sensor having many choices of an electrode material and capable of making an electrode fine while employing a manufacturing process for forming a response part in anodic oxidation treatment after the electrode is formed. SOLUTION: In the humidity sensor, a pair of electrodes 4 and 4 are formed on one side of a p-type silicon substrate 1 being a semiconductor substrate in a spaced-apart state and, in the p-type silicon substrate 1, the part spaced from both electrodes 4 and 4 is made porous from one surface side by anodic oxidation treatment between a pair of the electrodes 4 and 4 to form the response part 3 comprising a porous silicon region, and recessed parts 6 and 6 between the respective electrodes 4 and 4 on one side of the p-type silicon substrate 1. At the time of manufacture, the recessed parts 6 and 6 are formed on one side of the p-type silicon substrate 1 and the electrodes 4 and 4 are subsequently formed. Thereafter, the electrodes 4 and 4 are covered and a protective film is formed so as to fill the recessed parts 6 and 6 before the p-type silicon substrate 1 is porous form one side thereof by anode oxidation treatment to form the response part 3. COPYRIGHT: (C)2006,JPO&NCIPI
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