| 摘要 |
PROBLEM TO BE SOLVED: To enable the temperature control in a clean room with a minimum required amount of circulating air, the air conditioning operation in accordance with the amount of production, and the gradual expansion of an air conditioning facility. SOLUTION: An air conditioner for air circulation 6 which handles fix thermal load such as an operator, an illumination, a fan filter unit 2, 2 and the like to control the temperature in the clean room 1 to a predetermined temperature, and air conditioners 8A, 8B for facilities, which handle thermal load occurring in various devices 7A, 7B installed in the clean room 1 to control the temperatures in the various devices 7A, 7B to a predetermined temperature are installed in a clean room. Thus, even when the devices 7A, 7B which are different in process (in other words, different in heat release amount) are installed adjacently in proportion to the amount of production, there is no fear of causing thermal interference between the devices, the temperature control can be performed in the clean room 1 with a minimal required amount of circulating air, and the air conditioning operation can be realized in accordance with the amount of production. COPYRIGHT: (C)2006,JPO&NCIPI
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