| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To individually monitor a semiconductor device including transistors different in performance or position. <P>SOLUTION: A plurality of test ring oscillators commonly connecting an output terminal are provided on a semiconductor chip, selectively oscillated by a logic circuit and oscillation output output through the output terminal is monitored by a tester. If a successive circuit is used as the logic circuit, a great number of the ring oscillators can be selectively controlled without increasing terminals necessary for a test. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
