| 摘要 |
PROBLEM TO BE SOLVED: To provide a holder for adequately holding planar substrates, such as glass substrates used in manufacturing of planar displays like LCDs, PDPs and organic ELs. SOLUTION: The substrate holder provides a planar substrate holder for holding a plane substrate 12 positioned at the top of a support stand 10. This planar substrate holder is positioned quasi-horizontally at the top of the support stand 10, and contains a holding plate 20 with multiple primary holes 22 at the bottom, multiple primary elastic films 24, attached to the bottom of the holding plate 20 to seal the primary holes 22; an adhesive film 26 provided at the lower side of the primary elastic films 24 to adhere the plane substrate 12; and an elastic film control means for extending the primary elastic films downward. COPYRIGHT: (C)2006,JPO&NCIPI |
